Products
QVP Series Diaphragm Valves
● Long lifespan under rapid cycling
● High-temperature-resistant actuator
● Individual helium mass spectrometer leak testing per valve
● Optional modular surface-mount, tube weld, and VCR end connections
● High-temperature-resistant actuator
● Individual helium mass spectrometer leak testing per valve
● Optional modular surface-mount, tube weld, and VCR end connections
Product Description
Introduction
Engineered with a diaphragm-type hard-sealed structure for ultra-low leakage, extended lifespan, and rapid response. High-temperature-resistant actuator configurations are available, Designed for atomic layer deposition (ALD) systems, this valve delivers ultra-high-purity and toxic/corrosive gases in integrated circuit wafer production. The high-temperature actuator ensures reliable performance in elevated-temperature environments.
Technical specification
| Operating Pressure: | Vacuum to 145 psig |
| Operating Temperature: | -10℃-70℃,0 ℃-200℃ (High temperature type) |
| Flow Coefficient (cv): | 0.27/0.62 |
| Internal Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| External Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| Internal Surface Roughness: | Ra ≤ 0.13μm |