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编号 :

QVP Series Diaphragm Valves

● Long lifespan under rapid cycling
● High-temperature-resistant actuator
● Individual helium mass spectrometer leak testing per valve
● Optional modular surface-mount, tube weld, and VCR end connections

Categories:

QVP Series Diaphragm Valves

Product Inquiry
  • Product Description
  • Technical specification

    Introduction

    Engineered with a diaphragm-type hard-sealed structure for ultra-low leakage, extended lifespan, and rapid response. High-temperature-resistant actuator configurations are available, Designed for atomic layer deposition (ALD) systems, this valve delivers ultra-high-purity and toxic/corrosive gases in integrated circuit wafer production. The high-temperature actuator ensures reliable performance in elevated-temperature environments.

  • Technical specification

    Operating Pressure：

    Vacuum to 145 psig

    Operating Temperature：

    -10℃-70℃,0 ℃-200℃(High temperature type)

    Flow Coefficient (cv)：

    0.27/0.62

    Internal Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    External Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    Internal Surface Roughness：

    Ra ≤ 0.13µm

     

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If you have any questions or needs, please leave a message or contact us and we will reply you as soon as possible.

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