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编号 :

DVI Series Diaphragm Valves

● Compatible with modular gas distribution systems
● Dead-zone-free flow path design for easy purging
● Individual helium mass spectrometer leak testing per valve

Categories:

DVI Series Diaphragm Valves

Product Inquiry
  • Product Description
  • Technical specification

    Introduction

    Featuring a diaphragm-type hard-sealed structure with minimal leakage, this valve is designed for ultra-high-purity gases and toxic/corrosive media in semiconductor applications. its dead-zone-free flow path design facilitates eficient purging to eliminate gas retention. Packing-free diaphragm sealing ensures gas purity, meeting rigorous requirements for stable, safe, and high-purity gas delivery in semiconductor manufacturing.

     

  • Technical specification

    Operating Pressure：

    150psig

    Burst Pressure：

    450psig

    Operating Temperature：

    -10℃-80℃

    Flow Coefficient (Cv)：

    0.1/0.3HF

    Internal Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    External Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    Internal Surface Roughness：

    Ra ≤ 0.13µm

     

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