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编号 :

DVB Series Dual-Portthree-Way Diaphragm Valves

● Ideal for ultra-high-purity gas applications
● Diaphragm material: Ni-Co alloy/UNS R30003
● Rapid, repeatable pneumatic actuator performance
● Individual helium mass spectrometer leak testing per valve
● No internal threads or springs, significantly reducing particle generation and gas entrapment

Categories:

DVB Series Dual-Port Three-Way Diaphragm Valves

Product Inquiry
  • Product Description
  • Technical specification

    Introduction

    Featuring a compact integrated valve body design with an optimized purge structure. The absence of internal threads, springs, or redundant components minimizes dead volume and enhances cleanliness. Employing a diaphragm-type hard-sealed structure to achieve ultra-low leakage rates, this valve is engineered for ultra-high-purity gases and hiohly toxic/corrosive media in semiconductor applications, meeting process gas demands in ULSIC manufacturing.

     

  • Technical specification

    Operating Pressure：

    Vacuum to 150 psig

    Burst Pressure：

    3000psig

    Operating Temperature：

    -10℃-80℃

    Flow Coefficient (cv)：

    0.3

    Internal Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    External Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    Internal Surface Roughness：

    Ra ≤ 0.13µm

     

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