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编号 :

DVPH Series Pneumatic Diaphragm Valves

● Ideal for ultra-high-purity gas applications
● Diaphragm material：Ni-Co alloy/UNS R30003
● Individual helium mass spectrometer leak testing per valve
● Exceptional lifespan(4,000,000-cycle validated lifespan)
● Rapid, repeatable pneumatic actuator performance

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DVPH Series Pneumatic Diaphragm Valves

Product Inquiry
  • Product Description
  • Technical specification

    Introduction

    Utilizing a diaphragm-type hard-sealed structure with metalic bellows and fully welded valve body design to achieve ultra-low leakage rates. integrated with high-precision pneumatic actuators for rapid response performance. The valve body is constructed from 316L stainless steel, while the seat utilizes perfluoroelastomer sealing, enabling safe handling of ultra-high-purity gases and highly toxic/corrosive media in semiconductor applications. Specifically designed for stringent process gas reguirements in ULSIC manufacturing.

     

  • Technical specification

    Operating Pressure：

    Vacuum to 300 psig

    Burst Pressure：

    3000psig

    Operating Temperature：

    -10℃-70℃

    Flow Coefficient (cv)：

    0.5

    Internal Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    External Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    Internal Surface Roughness：

    Ra ≤ 0.13µm

     

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If you have any questions or needs, please leave a message or contact us and we will reply you as soon as possible.

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