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DVMH Series Manual Diaphragm Valves

● Ideal for ultra-high-purity gas applications
● Handle with position indicator window
● Standard 180° rotation angle (90° optional)
● Individual helium mass spectrometer leak testing per valve
● Extended lifespan (500,000-cycle validated lifespan)
● Lockout-Tagout (LOTO) optional feature to prevent misuse

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DVMH Series Manual Diaphragm Valves

Product Inquiry
  • Product Description
  • Technical specification

    Introduction

    Incorporating a diaphragm-type hard-sealed structure with metallic bellows and fully welded valve body design to achieve ultra-low leakage rates. Paired with an ergonomic manual operating mechanism for smooth and reliable on/off operations. The valve body is constructed from 316L stainless steel, while the seat utilizes perfluoroelastomer sealing, enabling precise control of ultra-high-purity gases and highly toxic/corrosive media in semiconductor applications. Engineered for critical process gas management in ULSIC fabrication.

  • Technical specification

    Operating Pressure：

    Vacuum to 300 psig

    Burst Pressure：

    3000psig

    Operating Temperature：

    -10℃-70℃

    Flow Coefficient (Cv)：

    0.5

    Internal Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    External Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    Internal Surface Roughness：

    Ra ≤ 0.13µm

     

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If you have any questions or needs, please leave a message or contact us and we will reply you as soon as possible.

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