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DVP Series Pneumatic Diaphragm Valves

● Ideal for ultra-high-purity gas applications
● Diaphragm material：Ni-Cr-Mo alloy/UNS NO6022
● Rapid, repeatable pneumatic actuator performance
● Individual helium mass spectrometer leak testing per valve

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DVP Series Pneumatic Diaphragm Valves

Product Inquiry
  • Product Description
  • Technical specification

    Introduction

    Featuring a diaphragm-type hard-sealed structure with metallic bellows and fully welded valve body design to achieve ultra-low leakage rates, Integrated with high-precision pneumatic actuators for rapid response performance. The valve body is constructed from 316L stainless steel, while the seat utilizes perfluoroelastomer sealing, enabling safe handling of ultra-high-purity gases and highly toxic/corrosive media in semiconductor applications. Specifically designed for stringent process gas requirements in ultra-large-scale integrated circuit (ULSlC) manufacturing.

     

     

  • Technical specification

    Operating Pressure：

    Vacuum to 150 psig (Low Pressure), Vacuum to 3000psig (High Pressure)

    Burst Pressure：

    3000 psig (Low Pressure), 9000 psig (High Pressure)

    Operating Temperature：

    -10℃ to 60℃ (Low Pressure), -10 ℃to 40℃(HighPressure)

    Flow Coefficient (cv)：

    0.25 (1/4")，0.7 (1/2"HF)

    Internal Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    External Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    Internal Surface Roughness：

    Ra ≤ 0.13µm

     

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