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编号 :

DVM Series Manual Diaphragm Valves

● Ideal for ultra-high-purity gas applications
● Ni-Cr-Mo alloy/UNS N06022 diaphragm material
● Individual helium mass spectrometer leak testing per valve

Categories:

DVM Series Manual Diaphragm Valves

Product Inquiry
  • Product Description
  • Technical specification

    Introduction

    Featuring a diaphragm-type hard-sealed structure with metallic bellows and fuly welded valve body design to achieve ultra-low leakage rates. Combined with an ergonomic manual operating mechanism that ensures smooth and reliable openina/closina operations. The valve body is constructed from 316L stainless steel, while the seat utilizes perfluoroelastomer sealing, enabling safe handling of ultra-high-purity gases and highly toxic/corrosive media in semiconductor applications. Specifically designed to meet precise process gas control requirements in ultra-large-scale integrated circuit (ULSlC) manufacturing.

     

  • Technical specification

    Operating Pressure：

    Vacuum to 300 psig (Low Pressure), Vacuum to 3000 psig (High Pressure)

    Burst Pressure：

    3000 psig (Low Pressure), 9000 psig (High Pressure)

    Operating Temperature：

    -10℃ to 60℃ (Low Pressure), -10℃ to 40℃ (High Pressure)

    Flow coefficient (cv)：

    0.25 (1/4"),0.35 (1/2"),0.7 (1/2"HF)

    Internal Leakage Rate：

    ≤ 1x10-11 Pa.m³/sec.He

    External Leakage Rate：

    ≤ 1x10-11 pa.m³/sec.He

    Internal Surface Roughness：

    Ra ≤ 0.13µm

     

     

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