Products
DVPH Series Pneumatic Diaphragm Valves
● Ideal for ultra-high-purity gas applications
● Diaphragm material：Ni-Co alloy/UNS R30003
● Individual helium mass spectrometer leak testing per valve
● Exceptional lifespan(4,000,000-cycle validated lifespan)
● Rapid, repeatable pneumatic actuator performance
● Diaphragm material：Ni-Co alloy/UNS R30003
● Individual helium mass spectrometer leak testing per valve
● Exceptional lifespan(4,000,000-cycle validated lifespan)
● Rapid, repeatable pneumatic actuator performance
Product Description
Introduction
Utilizing a diaphragm-type hard-sealed structure with metalic bellows and fully welded valve body design to achieve ultra-low leakage rates. integrated with high-precision pneumatic actuators for rapid response performance. The valve body is constructed from 316L stainless steel, while the seat utilizes perfluoroelastomer sealing, enabling safe handling of ultra-high-purity gases and highly toxic/corrosive media in semiconductor applications. Specifically designed for stringent process gas reguirements in ULSIC manufacturing.
Technical specification
| Operating Pressure: | Vacuum to 300 psig |
| Burst Pressure: | 3000psig |
| Operating Temperature: | -10℃-70℃ |
| Flow Coefficient (cv): | 0.5 |
| Internal Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| External Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| Internal Surface Roughness: | Ra ≤ 0.13μm |