Products
DVP Series Pneumatic Diaphragm Valves
● Ideal for ultra-high-purity gas applications
● Diaphragm material：Ni-Cr-Mo alloy/UNS NO6022
● Rapid, repeatable pneumatic actuator performance
● Individual helium mass spectrometer leak testing per valve
● Diaphragm material：Ni-Cr-Mo alloy/UNS NO6022
● Rapid, repeatable pneumatic actuator performance
● Individual helium mass spectrometer leak testing per valve
Product Description
Introduction
Featuring a diaphragm-type hard-sealed structure with metallic bellows and fully welded valve body design to achieve ultra-low leakage rates, Integrated with high-precision pneumatic actuators for rapid response performance. The valve body is constructed from 316L stainless steel, while the seat utilizes perfluoroelastomer sealing, enabling safe handling of ultra-high-purity gases and highly toxic/corrosive media in semiconductor applications. Specifically designed for stringent process gas requirements in ultra-large-scale integrated circuit (ULSlC) manufacturing.
Technical specification
| Operating Pressure: | Vacuum to 150 psig (Low Pressure), Vacuum to 3000psig (High Pressure) |
| Burst Pressure: | 3000 psig (Low Pressure), 9000 psig (High Pressure) |
| Operating Temperature: | -10℃ to 60℃ (Low Pressure), -10 ℃to 40℃(HighPressure) |
| Flow Coefficient (cv): | 0.25 (1/4"), 0.7 (1/2"HF) |
| Internal Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| External Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| Internal Surface Roughness: | Ra ≤ 0.13μm |