Products
DVI Series Diaphragm Valves
● Compatible with modular gas distribution systems
● Dead-zone-free flow path design for easy purging
● Individual helium mass spectrometer leak testing per valve
● Dead-zone-free flow path design for easy purging
● Individual helium mass spectrometer leak testing per valve
Product Description
Introduction
Featuring a diaphragm-type hard-sealed structure with minimal leakage, this valve is designed for ultra-high-purity gases and toxic/corrosive media in semiconductor applications. its dead-zone-free flow path design facilitates eficient purging to eliminate gas retention. Packing-free diaphragm sealing ensures gas purity, meeting rigorous requirements for stable, safe, and high-purity gas delivery in semiconductor manufacturing.
Technical specification
| Operating Pressure: | 150psig |
| Burst Pressure: | 450psig |
| Operating Temperature: | -10℃-80℃ |
| Flow Coefficient (Cv): | 0.1/0.3HF |
| Internal Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| External Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| Internal Surface Roughness: | Ra ≤ 0.13μm |