Products
DVMH Series Manual Diaphragm Valves
● Ideal for ultra-high-purity gas applications
● Handle with position indicator window
● Standard 180° rotation angle (90° optional)
● Individual helium mass spectrometer leak testing per valve
● Extended lifespan (500,000-cycle validated lifespan)
● Lockout-Tagout (LOTO) optional feature to prevent misuse
● Handle with position indicator window
● Standard 180° rotation angle (90° optional)
● Individual helium mass spectrometer leak testing per valve
● Extended lifespan (500,000-cycle validated lifespan)
● Lockout-Tagout (LOTO) optional feature to prevent misuse
Product Description
Introduction
Incorporating a diaphragm-type hard-sealed structure with metallic bellows and fully welded valve body design to achieve ultra-low leakage rates. Paired with an ergonomic manual operating mechanism for smooth and reliable on/off operations. The valve body is constructed from 316L stainless steel, while the seat utilizes perfluoroelastomer sealing, enabling precise control of ultra-high-purity gases and highly toxic/corrosive media in semiconductor applications. Engineered for critical process gas management in ULSIC fabrication.
Technical specification
| Operating Pressure: | Vacuum to 300 psig |
| Burst Pressure: | 3000psig |
| Operating Temperature: | -10℃-70℃ |
| Flow Coefficient (Cv): | 0.5 |
| Internal Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| External Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| Internal Surface Roughness: | Ra ≤ 0.13μm |