Products
DVB Series Dual-Portthree-Way Diaphragm Valves
● Ideal for ultra-high-purity gas applications
● Diaphragm material: Ni-Co alloy/UNS R30003
● Rapid, repeatable pneumatic actuator performance
● Individual helium mass spectrometer leak testing per valve
● No internal threads or springs, significantly reducing particle generation and gas entrapment
● Diaphragm material: Ni-Co alloy/UNS R30003
● Rapid, repeatable pneumatic actuator performance
● Individual helium mass spectrometer leak testing per valve
● No internal threads or springs, significantly reducing particle generation and gas entrapment
Product Description
Introduction
Featuring a compact integrated valve body design with an optimized purge structure. The absence of internal threads, springs, or redundant components minimizes dead volume and enhances cleanliness. Employing a diaphragm-type hard-sealed structure to achieve ultra-low leakage rates, this valve is engineered for ultra-high-purity gases and hiohly toxic/corrosive media in semiconductor applications, meeting process gas demands in ULSIC manufacturing.
Technical specification
| Operating Pressure: | Vacuum to 150 psig |
| Burst Pressure: | 3000psig |
| Operating Temperature: | -10℃-80℃ |
| Flow Coefficient (cv): | 0.3 |
| Internal Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| External Leakage Rate: | ≤ 1×10-11 Pa.m³/sec.He |
| Internal Surface Roughness: | Ra ≤ 0.13μm |